| 摘要 |
A radiation sensitive resin composition for forming a protective film, comprising:
[A] a copolymer of (a1) an unsaturated carboxylic acid and/or an unsaturated carboxylic anhydride, (a2) an epoxy group-containing unsaturated compound and (a3) an unsaturated compound different from the components (a1) and (a2) ;
[B] a monofunctional polymerizable unsaturated compound having a molecular weight of 180 or more and a carboxyl group;
[C] a polyfunctional polymerizable unsaturated compound; and
[D] a photopolymerization initiator,
a method of forming a protective film from the above composition and a protective film formed from the above composition. The composition can provide a cured film having high flatness, has high developability and heat resistance, is advantageously used to form a protective film for liquid crystal display devices and solid-state image sensing devices, and has high storage stability as a composition. |
