发明名称 |
SCANNING PROBE MICROSCOPE |
摘要 |
A scanning probe microscope is provided, which can be stably used for a long time even if excitation efficiency varies during scan. A cantilever (5) is excited, and the cantilever (5) and a sample are subjected to relative scanning. A second-harmonic component detection circuit (31) detects second-harmonic component amplitude of oscillation of the cantilever (5) as integral-multiple component amplitude. The second-harmonic component amplitude is amplitude of a second-harmonic component having a frequency twice as high as excitation frequency. An excitation intensity adjustment circuit (33) controls excitation intensity based on the detected second-harmonic component amplitude such that the second-harmonic component amplitude is kept constant. |
申请公布号 |
EP1978348(A4) |
申请公布日期 |
2012.11.28 |
申请号 |
EP20060811703 |
申请日期 |
2006.10.12 |
申请人 |
NATIONAL UNIVERSITY CORPORATION KANAZAWA UNIVERSITY |
发明人 |
ANDO, TOSHIO;SAKASHITA, MITSURU;UCHIHASHI, TAKAYUKI |
分类号 |
G01Q60/24;G01Q60/32;B82Y35/00;G01Q10/06;G01Q30/06 |
主分类号 |
G01Q60/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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