| 摘要 |
PURPOSE: A hydrogen ion concentration sensing film and a manufacturing method thereof are provided to include an aluminum oxide layer in a hydrogen ion concentration sensing film, thereby obtaining high sensitivity and excellent reliability. CONSTITUTION: A hydrogen ion concentration sensing film comprises a substrate(10), an oxide silicon layer(12), a hafnium oxide layer(14), and an aluminum oxide layer(16). The oxide silicon layer is formed on the substrate. The hafnium oxide layer is arranged on the oxide silicon layer. The aluminum oxide layer is arranged on the hafnium oxide layer.
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