| 摘要 |
Apparatus for forming films on substrates. comprising a doctor blade 233, a programmable robot (29, figure 1) for moving the doctor blade along X, Y and Z axes, the X and Y-axes being generally horizontal and the Z axis being generally vertical, and a flexible coupling 239 for coupling the doctor blade to the robot, said flexible coupling being configured for exerting a downward force on the doctor blade as it moves along a substrate during the formation of a film on the substrate. The flexible coupling may comprise a spring (251, figure 14). Also disclosed is a method of using such apparatus.
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