| 摘要 |
PURPOSE: A wafer picker apparatus for a solar cell wafer transfer system is provided to prevent damage to a wafer which is generated by collision of a quartz boat or a slot of other magazines by arranging a lower end of the wafer, which is absorbed in vacuum to a vacuum picker, at an equal interval to an upper end through a wafer align picker means. CONSTITUTION: A wafer picker elevator unit(15) comprises a horizontal slide(12) and a vertical slide. The horizontal slide is installed at a front surface of a horizontal guide bar(11) which is fixed to one side upper end of a base plate. A wafer picker unit(20) vacuum-absorbs and attaches a large number of wafers which are lifted from a magazine(M). The wafer picker unit is fixed to the front surface of the vertical slide. Ball screws(54,59) rotate in the magazine and a quartz boat according to each motor(53,58) driving. |
