发明名称 Superhigh speed shuttle
摘要 PURPOSE: A super high speed shuttle is provided to allow a tray to be entered and let out in various directions by converting a conveying unit and a grip unit using a rotary unit. CONSTITUTION: An LM(linear motion) rail(40) is equipped on a cover plate(30) at a predetermined interval. A pair of moving blocks(50) move along the LM rail. A cam block(60) is installed on a pair of the moving blocks, respectively. A cylinder(70) is connected to a moving member(72) to move the cam block. A pair of aligner arms(80) arrange trays which are entered therein.
申请公布号 KR20120128214(A) 申请公布日期 2012.11.27
申请号 KR20110046021 申请日期 2011.05.17
申请人 发明人
分类号 H01L21/677;H01L21/68;H02K13/02 主分类号 H01L21/677
代理机构 代理人
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