发明名称 Film coating system and isolating device thereof
摘要 A film coating system for coating an object includes a working station and an isolating device. The object is disposed on the working station, and the isolating device is utilized to isolate the object. The isolating device includes a body generating a first power, a first working fluid, a second working fluid, a first guiding portion and a second guiding portion. The first guiding portion guides the first working fluid to pass through the body, thereby forming a first working region to coat the object thereon. The second guiding portion guides the second working fluid excited by the first power of the body to pass through the body, thereby forming a second working region to separate the first working region from the object.
申请公布号 US8316796(B2) 申请公布日期 2012.11.27
申请号 US20070954843 申请日期 2007.12.12
申请人 LIU CHI-HUNG;CHEN CHIH-MING;SU CHUN-HSIEN;CHEN CHIH-WEI;HSU WEN-TUNG;LIN CHUN-HUNG;INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 LIU CHI-HUNG;CHEN CHIH-MING;SU CHUN-HSIEN;CHEN CHIH-WEI;HSU WEN-TUNG;LIN CHUN-HUNG
分类号 C23C16/00 主分类号 C23C16/00
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