发明名称 Vertical diode using silicon formed by selective epitaxial growth
摘要 Some embodiments relate to an apparatus that exhibits vertical diode activity to occur between a semiconductive body and an epitaxial film that is disposed over a doping region of the semiconductive body. Some embodiments include an apparatus that causes both vertical and lateral diode activity. Some embodiments include a gated vertical diode for a finned semiconductor apparatus. Process embodiments include the formation of vertical-diode apparatus.
申请公布号 US8318553(B2) 申请公布日期 2012.11.27
申请号 US20110986875 申请日期 2011.01.07
申请人 RUSS CHRISTIAN;PACHA CHRISTIAN;JENEI SNEZANA;SCHRUEFER KLAUS;INFINEON TECHNOLOGIES AG 发明人 RUSS CHRISTIAN;PACHA CHRISTIAN;JENEI SNEZANA;SCHRUEFER KLAUS
分类号 H01L21/36;H01L21/329 主分类号 H01L21/36
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