| 摘要 |
FIELD: physics.SUBSTANCE: invention is particularly applicable to detectors for use in positron emission tomography (PET) systems and single-photon emission computed tomography (SPECT) systems, optical imaging devices and other systems in which arrays of photosensors are installed. According to the invention, an avalanche photodiode operating in Geiger mode includes: an anode; a cathode, a first epixial layer between the anode and the cathode; a buried component; a vertical electrode having an electrical connection in operating state with the buried component; and an insulating channel surrounding the buried component. A method of making the avalanche photodiode is also provided.EFFECT: possibility of increasing efficiency.15 cl, 17 dwg |
