摘要 |
FIELD: physics.SUBSTANCE: high-speed neutral particle source has a basic structure which has an ion source with a cold cathode and closed electron drift, a neutraliser made in form of external and internal coaxial surfaces which collectively form a slit-type channel of defined length which is interfaced with the closed output slit of the source, and separator electrodes. The separator electrodes are mounted on the neutraliser and are in form of surfaces which collectively form a slit-type separation channel of defined length and width, which is interfaced with the closed output slit of the neutraliser.EFFECT: full neutralisation of the output stream of particles and high intensity thereof.12 cl, 16 dwg |