发明名称 |
Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method |
摘要 |
To calculate data of an original, a computer is caused to execute the following steps of converting data regarding an intended pattern to be formed on a substrate into frequency-domain data, calculating a two-dimensional transmission cross coefficient using a function representing an effective light source that an illumination device forms on a pupil plane of a projection optical system when the original is absent on an object plane of the projection optical system and using a pupil function of the projection optical system, calculating a diffracted light distribution from a pattern that is formed on the object plane using both the frequency-domain data and data of at least one component of the calculated two-dimensional transmission cross coefficient, and converting data of the calculated diffracted light distribution into spatial-domain data to determine the data of the original. |
申请公布号 |
US8321815(B2) |
申请公布日期 |
2012.11.27 |
申请号 |
US20090512649 |
申请日期 |
2009.07.30 |
申请人 |
YAMAZOE KENJI;HONDA TOKUYUKI;CANON KABUSHIKI KAISHA |
发明人 |
YAMAZOE KENJI;HONDA TOKUYUKI |
分类号 |
G06F17/50;G03F1/32;G03F1/36;G03F1/68;H01L21/027 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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