发明名称 |
Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions |
摘要 |
A SAW-based micro-sensor apparatus for simultaneously monitoring acceleration/vibration and temperature utilizing a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line). The SAW device can be located in different locations on a substrate with respect to a thin piezoelectric diaphragm comprising an inertial mass. The temperature-compensated acceleration/vibration can be measured utilizing a frequency difference between an acceleration sensitive SAW resonator (e.g., SAW-g) and a temperature sensitive SAW resonator (e.g., SAW-T). The temperature can be measured utilizing a frequency shift provided by the SAW-T and a temperature reference SAW resonator (e.g., SAW-R). Similarly, the phase response of different reflectors of the SAW delay line can be utilized to differentially measure the acceleration/vibration and temperature. |
申请公布号 |
US8317392(B2) |
申请公布日期 |
2012.11.27 |
申请号 |
US20090353069 |
申请日期 |
2009.01.13 |
申请人 |
COBIANU CORNEL;PAVELESCU IOAN;GOLOGANU MIHAL;HONEYWELL INTERNATIONAL INC. |
发明人 |
COBIANU CORNEL;PAVELESCU IOAN;GOLOGANU MIHAL |
分类号 |
G01K11/26;G01P15/09;H03H9/02 |
主分类号 |
G01K11/26 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|