| 摘要 |
<p>PURPOSE: An apparatus for transferring a substrate is provided to easily control substrate transfer speed and a position in comparison with a magnetic levitation method by transferring the substrate using a transfer robot after letting the substrate lifted. CONSTITUTION: A flotation module lets a transferred object float at a predetermined height in a first chamber. The flotation module comprises a rail(120), a carrier(130), and a plurality of magnets. The rail is prepared in through the first chamber and a second chamber. A transfer robot(150) transfers the transferred object to the second chamber by pulling or pushing the transferred object with the flotation module. The transfer robot comprises a robot body(151) and a robot arm(152). A gripping portion(160) lets the robot arm gripped in a carrier. [Reference numerals] (AA,BB) Substrate</p> |
