发明名称 METHOD OF LASER COPPER DEPOSITION FROM SOLUTION OF ELECTROLYTE ON DIELECTRIC SURFACE
摘要 FIELD: electricity.SUBSTANCE: method of laser copper deposition from electrolyte solution on dielectric surface involves preparation of electrolyte solution, washing of substrate, laser focusing on substrate-electrolyte boundary and scanning of emission on the above surface; at that, electrolyte solution includes 0.01 M CuCl, 0.05 M NaOH, 0.03 M of sodium-potassium tartrate (KNaCHO·4HO), 0.075 M sorbite, parabenzokinone 5*10M; range of laser emission powers is 30 to 1000 mW, and speed of its movement relative to focus point is 0.01-0.25 mm/sec.EFFECT: creation of laser copper deposition method from electrolyte solution on dielectric surface, in which there provided is formation of copper deposits with high conductivity owing to forming dense homogeneous deposit due to coalescent deposit formation mechanism.6 dwg
申请公布号 RU2468548(C1) 申请公布日期 2012.11.27
申请号 RU20110141911 申请日期 2011.10.11
申请人 MENCHIKOV LEONID GENNAD'EVICH 发明人 KOCHEMIROVSKIJ VLADIMIR ALEKSEEVICH;LOGUNOV LEV SERGEEVICH;MENCHIKOV LEONID GENNAD'EVICH;SAFONOV SERGEJ VLADIMIROVICH;TUMKIN IL'JA IGOREVICH
分类号 H05K3/00 主分类号 H05K3/00
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