发明名称 Method and program for operating test apparatus
摘要 Disclosed is a method for operating a test apparatus in which the testing efficiency is drastically increased. The test apparatus has a plurality of stages for testing wafers by using operation buttons displayed on the operating screens of each of a plurality of monitors. Exclusion condition buttons for excluding operation buttons are set in at least one monitor using exclusion condition data prepared by combining data required to perform various functions of the test apparatus and an exclusion condition pattern prepared by combining the exclusion condition of the exclusion condition data into data for deciding whether the operating button configured to operate each function can be pressed or not. Also, display of the screen that satisfies the exclusion condition for at least one monitor is prevented.
申请公布号 US8319514(B2) 申请公布日期 2012.11.27
申请号 US20100851817 申请日期 2010.08.06
申请人 SANO SATOSHI;KOJIMA SHINJI;TOKYO ELECTRON LIMITED 发明人 SANO SATOSHI;KOJIMA SHINJI
分类号 G01R31/26 主分类号 G01R31/26
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