发明名称 Method and system of embedded microlens
摘要 An image sensor includes an array of photo-sensing regions formed in a semiconductor substrate, a dielectric layer over the array of photo-sensing regions, and an array of microlenses formed in the dielectric layer. Each of the microlenses is center-aligned over one of the photo-sensing regions and has a truncated plano-convex shape. The microlenses have an index of refraction that is higher than the dielectric layer's refraction index. Each of the microlenses has a smooth circular top, a flat circular bottom, and a curved circumferential side convex towards the semiconductor substrate.
申请公布号 US8319303(B2) 申请公布日期 2012.11.27
申请号 US20110987930 申请日期 2011.01.10
申请人 YANG JIANPING;HUANG HERB;HUO JIEGUANG;SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION 发明人 YANG JIANPING;HUANG HERB;HUO JIEGUANG
分类号 H01L31/0232 主分类号 H01L31/0232
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