发明名称 |
DEVICE FOR MEASURING ENVIRONMENTAL FORCES AND METHOD OF FABRICATING THE SAME |
摘要 |
<p>A device for measuring environmental forces, and a method for fabricating the same, is disclosed that comprises a device wafer, the device wafer comprising a first device layer separated from a second device layer by a first insulation layer. The first device wafer is bonded to an etched substrate wafer to create a suspended diaphragm and boss, the flexure of which is determined by an embedded sensing element.</p> |
申请公布号 |
CA2777309(A1) |
申请公布日期 |
2012.11.23 |
申请号 |
CA20122777309 |
申请日期 |
2012.05.18 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
GAMAGE, SISIRA KANKANAM;MANTRAVADI, NARESH VENKATA |
分类号 |
G01L1/04;G01L7/08;G01L9/06 |
主分类号 |
G01L1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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