发明名称 |
Filter for Material Supply Apparatus |
摘要 |
A filter is used in a target material supply apparatus and includes a sheet having a first flat surface and a second opposing flat surface, and a plurality of through holes. The first flat surface is in fluid communication with a reservoir that holds a target mixture that includes a target material and non-target particles. The through holes extend from the second flat surface and are fluidly coupled at the second flat surface to an orifice of a nozzle. The sheet has a surface area that is exposed to the target mixture, the exposed surface area being at least a factor of one hundred less than an exposed surface area of a sintered filter having an equivalent transverse extent to that of the sheet. |
申请公布号 |
US2012292527(A1) |
申请公布日期 |
2012.11.22 |
申请号 |
US201113112784 |
申请日期 |
2011.05.20 |
申请人 |
FOMENKOV IGOR V.;PARTLO WILLIAM N.;VASCHENKO GEORGIY O.;OLDHAM WILLIAM;CYMER, INC. |
发明人 |
FOMENKOV IGOR V.;PARTLO WILLIAM N.;VASCHENKO GEORGIY O.;OLDHAM WILLIAM |
分类号 |
H05H1/46 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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