| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member for an exhaust gas treating apparatus which has an excellent corrosion resistance to the high-temperature corrosion by a PFC gas, and weight-saves and miniaturizes the exhaust gas treating apparatus. <P>SOLUTION: The member for an exhaust gas treating apparatus from a semiconductor and a liquid crystal manufacturing device is such that a Ni-Al alloy layer is formed to a surface of a base material, wherein the material of the base material is a Ni-Cr-Mo alloy or a Ni-Cr-Fe alloy, the Ni-Al layer has the thickness of 10-200 μm, and the composition includes 10-60 wt.% of Al, at least 25 wt.% of the total content of Co, Mo, Fe and W, and a remainder consisting of Ni and inevitable impurities. <P>COPYRIGHT: (C)2013,JPO&INPIT |
