| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a separation device solving the problem wherein the separation system using a three-parameter multi-spindle separation device gets large in the number of separation devices, gets complicated and heavy, and brings about a high manufacturing cost. <P>SOLUTION: There is provided an embodiment of the three-parameter multi-spindle separation device 50 constituted to limit propagation of vibration between a mass and a base. In one embodiment, the three-parameter multi-spindle separation device 50 is constituted to have a separation device housing 52 constituted to be attached to the base, opposed bellows 82, 84 sealed in an inside of the separation device housing 52 to be attached, and a damper piston suspended movably in the inside of the separation device housing between the opposed bellows 82, 84. The damper piston is constituted to be connected to the mass. The opposed bellows 82, 84 turn away motion of the damper piston along three substantially orthogonal axes 106, 107, 108, and limit the propagation of the vibration between the mass and the base. <P>COPYRIGHT: (C)2013,JPO&INPIT |
