| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas analyzing device capable of controlling the flow rate of a gas cell while controlling the pressure in the gas cell. <P>SOLUTION: A gas analyzing device comprising: a gas cell 5 for flowing gas to be measured; an infrared ray source for irradiating the gas to be measured with infrared rays, intensity detection means for detecting the intensity of the light transmitted through the gas cell 5; pressure detection means 4 for detecting the pressure in the gas cell 5, a first pump 3 disposed on the upstream side of the gas cell 5; a second pump 9 disposed on the downstream side of the gas cell 5; a valve 2 disposed on the upstream side of the gas cell 5; and control means for controlling a rotation number of the second pump 9. The pressure in the gas cell 5 is controlled based on the pressure detected by the pressure detection means 4. <P>COPYRIGHT: (C)2013,JPO&INPIT |
