| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor having high accuracy by suppressing a sensitivity difference between a case where an inertia mass body is displaced to a substrate side and a case where the inertia mass body is displaced to an opposite side of the substrate by suppressing air dumping. <P>SOLUTION: The acceleration sensor comprises: a substrate 1; a detection electrode 2; a torsion beam 3; a detection plate 4; a link beam 5; and an inertia mass body 6 supported by the link beam 5 to be displaceable in a direction in which one surface 6a and the other surface 6b are opposed to each other. The inertia mass body 6 includes a plurality of first through-holes H1 provided to pass through the inertia mass body 6 in the direction. The detection plate 4 includes a plurality of second through-holes H2 provided to pass through the detection plate 4 in the direction. Each of the first through-holes H1 has a larger opening area than that of each of the second through-holes H2. <P>COPYRIGHT: (C)2013,JPO&INPIT |
