| 摘要 |
The present invention is to provide a backflow prevention apparatus of a clean room for solving a negative pressure point in the clean room so as to prevent a backflow from underfloor of the clean room. An intake port for suctioning the air of an underfloor chamber, a fan for supplying the air to an upper part in the apparatus, and a blowoff port installed on a side surface of an upper-floor part of the apparatus for supplying the air into the clean room are provided. By supplying the air of the underfloor chamber into the clean room, the backflow from the underfloor chamber into the clean room is prevented.
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