发明名称 |
Verfahren zum Herstellen einer Solarzelle sowie Solarzelle |
摘要 |
<p>A manufacturing method of a solar cell including a transparent conductive film formed on a transparent substrate includes the steps of: preparing a target, the target including ZnO and a material including a substance including an Al or a Ga, the ZnO being a primary component of the target; in a first atmosphere including a process gas, applying a sputter electric voltage to the target and forming a first layer included in the transparent conductive film; in a second atmosphere including a greater amount of an oxygen gas compared to the first atmosphere, applying a sputter electric voltage to the target and forming a second layer on the first layer, the second layer being included in the transparent conductive film; and forming an irregular shape by performing an etching process on the transparent conductive film.</p> |
申请公布号 |
DE112010000803(T8) |
申请公布日期 |
2012.11.22 |
申请号 |
DE20101100803T |
申请日期 |
2010.01.21 |
申请人 |
ULVAC, INC. |
发明人 |
USAMI, TATSUMI;TAKAHASHI, HIROHISA;ISHIBASHI, SATORU;SHIRAI, MASANORI;AKIYAMA, MICHIO |
分类号 |
H01L31/18;H01L31/0224;H01L31/0236 |
主分类号 |
H01L31/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|