| 摘要 |
<P>PROBLEM TO BE SOLVED: To evade the interference between an end of a substrate W and a following floating unit 15, etc. when the end is transferred to the following floating unit 15 side over an insertion gap G. <P>SOLUTION: A pair of conveying rollers 27 are provided spaced apart in a conveyance direction at an upper part inside a unit case 21, and a conveying motor 29 for rotating the pair of conveying rollers 27 is provided at a lower part inside the unit case 21. A suction center position of a suction fan 41 provided under a lower surface of the unit case 21 is set in the middle between the pair of conveying rollers 27 in the conveyance direction so that the substrate W is transformed to a concave shape between the pair of conveying rollers 27. <P>COPYRIGHT: (C)2013,JPO&INPIT |
