发明名称 PEELING METHOD AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE PEELING METHOD
摘要 The present invention provides a simplifying method for a peeling process as well as peeling and transcribing to a large-size substrate uniformly. A feature of the present invention is to peel a first adhesive and to cure a second adhesive at the same time in a peeling process, thereby to simplify a manufacturing process. In addition, the present invention is to devise the timing of transcribing a peel-off layer in which up to an electrode of a semiconductor are formed to a predetermined substrate. In particular, a feature is that peeling is performed by using a pressure difference in the case that peeling is performed with a state in which plural semiconductor elements are formed on a large-size substrate.
申请公布号 US2012295375(A1) 申请公布日期 2012.11.22
申请号 US201213547360 申请日期 2012.07.12
申请人 YAMAZAKI SHUNPEI;TAKAYAMA TORU;MARUYAMA JUNYA;GOTO YUUGO;OHNO YUMIKO;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;TAKAYAMA TORU;MARUYAMA JUNYA;GOTO YUUGO;OHNO YUMIKO
分类号 H01L33/52;G02F1/136;G02F1/1368;G09F9/30;H01L21/77;H01L21/84;H01L27/12;H01L27/32;H01L29/786;H05B33/14 主分类号 H01L33/52
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