发明名称 |
MICRO ELECTRO-MECHANICAL HEATER |
摘要 |
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
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申请公布号 |
US2012292528(A1) |
申请公布日期 |
2012.11.22 |
申请号 |
US201013510825 |
申请日期 |
2010.08.26 |
申请人 |
OH YUNJE;ASIF SYED AMANULLA SYED;CYRANKOWSKI EDWARD;WARREN ODEN LEE;HYSITRON, INC. |
发明人 |
OH YUNJE;ASIF SYED AMANULLA SYED;CYRANKOWSKI EDWARD;WARREN ODEN LEE |
分类号 |
H01J37/20 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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