| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an organic EL element manufacturing method and manufacturing apparatus which, while shortening the distance between a substrate and a vapor deposition source, can efficiently manufacture a high quality organic EL element having its luminous color fluctuations restricted. <P>SOLUTION: The organic EL element manufacturing method includes a vapor deposition process in which a gasified organic layer formation material is discharged from a nozzle to form an organic layer on a substrate moving relatively with respect to the nozzle, through which process a light emission region composed of the organic layer and having a width A (mm) in a direction perpendicular to the substrate movement direction is formed. In this manufacturing method, the vapor deposition process is carried out in a manner to satisfy the relationship W≥A+2×h (however, h≤5 mm), where W is a length (in mm) in an opening part of the nozzle in a direction perpendicular to the substrate movement direction and h is a distance (in mm) between the opening part and the substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
