| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam homogenizer optical system which is capable of easily obtaining an output beam having a desired shape and a highly uniform intensity distribution. <P>SOLUTION: The beam homogenizer optical system comprises: an output unit which outputs a laser beam; an optical waveguide which includes a condenser lens receiving and condensing the output laser beam and then outputting it, a core region, and at least one layer of a clad region on the outer periphery of the core region, makes the laser beam outputted from the condenser lens impinge on the core region and outputs a laser beam having a Gaussian intensity distribution substantially; and a beam homogenizer element which receives the laser beam outputted from the optical waveguide and outputs a laser beam whose cross-sectional intensity profile on an irradiated object has a top flat shape. A wavelength of the laser beam is equal to or shorter than a cut-off wavelength of the optical waveguide, and a core diameter and a relative refractive index difference between the core region and the clad region adjacent to the core region are set so that a V value is larger than 2.4 and equal to or smaller than 3.7, whereby single-mode transmission is performed substantially in the optical waveguide. <P>COPYRIGHT: (C)2013,JPO&INPIT |
