| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure not only a bright macroparticle but also non-bright macroparticle and to measure not only speed distribution of a macroparticle but also particle size distribution and charged state (positive, negative, neutral) of the macroparticle. <P>SOLUTION: An electrode with a hole through which a macroparticle can pass is arranged vertically to a moving direction of the macroparticle to form one or more non-electric field space and one or more electric field space. A particle size of the macroparticle is measured by applying light from an external light source to the macroparticle and time required for moving the macroparticle by a predetermined distance in the non-electric field space and the electric field space is measured. A speed of the macroparticle in the non-electric field space and a speed change in the electric field space are found out based on the measured time, the particle size distribution of macroparticle is measured based on the particle size, and the speed distribution and charged state of the macroparticle are measured based on the speed and the speed change. <P>COPYRIGHT: (C)2013,JPO&INPIT |
