发明名称 LOCALIZED SURFACE PLASMON SENSOR CHIP
摘要 <P>PROBLEM TO BE SOLVED: To provide a localized surface plasmon sensor chip that prevents detection sensitivity to a measurement environment from decreasing. <P>SOLUTION: A localized surface plasmon sensor chip comprises: a substrate 11; first metal microstructures 21 that are formed on the substrate 11; second metal microstructures 22 that are formed on the substrate 11 and are provided between the first metal microstructures 21; and a thin film 23 that is formed on the first and second metal microstructures 21 and 22. The first metal microstructures 21 have such a shape that each edge face contacting the substrate 11 is vertical to a surface of the substrate or that each structure cross-section area increases towards the surface of the substrate. The second metal microstructures 22 are respectively arranged near positions in no contact with the first metal microstructures 21, and have such a shape that each edge face contacting the substrate 11 is vertical to the surface of the substrate 11 or that each structure cross-section area increases towards the surface of the substrate 11. The thin film 23 is formed in a manner to cover the first and second metal microstructures 21 and 22. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012229929(A) 申请公布日期 2012.11.22
申请号 JP20110096852 申请日期 2011.04.25
申请人 SEIKO EPSON CORP 发明人 MIYAZAWA TATSUNORI
分类号 G01N21/27;G01N21/01 主分类号 G01N21/27
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