MANUFACTURING METHOD OF LIQUID INJECTION HEAD, MANUFACTURING METHOD OF LIQUID INJECTION DEVICE, AND MANUFACTURING METHOD OF PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a liquid injection head in which a displacement amount of a piezoelectric element can be improved, a manufacturing method of a liquid injection device, and a manufacturing method of a piezoelectric element.

SOLUTION: A manufacturing method of a liquid injection head includes the steps of: forming a first electrode; forming a first coating film whose film thickness is 100 nm or below by applying a precursor solution containing at least bismuth and iron to an upper part of the first electrode; forming a first piezoelectric film by crystallizing the first coating film by heating; forming a second coating film by further applying the precursor solution to an upper part of the first piezoelectric film; and forming a second piezoelectric film by crystallizing the second coating film by heating.

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