| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of correctly determining the quality of a product even if much time is required from the operation start of a manufacturing process apparatus therefor until the apparatus is stabilized. <P>SOLUTION: The inspection apparatus comprises: a signal input unit 6; storage units 3 and 5; a waveform recording processing unit 16 for recording signals of one cycle, acquired by the signal input unit 6, in a manufacturing process in which the same state change is repeated, at a fixed sampling interval; a comparison processing unit 20 for determining the quality of a product by comparing a measured waveform 17 recorded by the waveform recording processing unit 16 with a maximum waveform 14 and a minimum waveform 15 for quality determination reference stored in the storage units 3 and 5; and an expansion/reduction processing unit 19 for performing expansion or reduction processing on the maximum waveform 14 and the minimum waveform 15 with respect to a time base on the basis of required time for one cycle of the measured waveform. The apparatus then performs comparison processing of the maximum waveform and the minimum waveform subjected to the expansion or reduction processing by the expansion/reduction processing unit 19 with the measured waveform 17 and determines characteristics of the measured waveform 17, so that the quality of the product is determined. <P>COPYRIGHT: (C)2013,JPO&INPIT |
