| 发明名称 |
MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microelectromechanical (MEMS) device (1300) including a substrate (20), a movable element (1340) over the substrate (20), and an actuation electrode (142) above the movable element (1340). <P>SOLUTION: The movable element (1340) includes a deformable layer (1302) and a reflective element (1314). The deformable layer (1302) is separated from the reflective element (1314). <P>COPYRIGHT: (C)2013,JPO&INPIT |
| 申请公布号 |
JP2012230407(A) |
申请公布日期 |
2012.11.22 |
| 申请号 |
JP20120148339 |
申请日期 |
2012.07.02 |
| 申请人 |
QUALCOMM MEMS TECHNOLOGIES INC |
发明人 |
CHUI CLARENCE;WILLIAM CUMMINGS;GALLY BRIAN J;LIOR KOGUT;TUNG MING-HAU;TUNG YEH-JIUN;CHIANG CHIH-WEI;DENIS ENDISCH |
| 分类号 |
G02B26/02;B81B3/00;B81C99/00;G09G3/20 |
主分类号 |
G02B26/02 |
| 代理机构 |
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