| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that is small in variation of the displacement to formation variation of the individual electrode, and to provide a liquid ejection head using the same and a recording device. <P>SOLUTION: The piezoelectric actuator 21 is provided by laminating an internal electrode 34, a piezoelectric ceramic layer 21b, and a surface electrode 35 in this order on a diaphragm 21a. In the piezoelectric actuator, the spaces 21c and 21d are provided on the piezoelectric ceramic layer 21b under a peripheral edge of the surface electrode 35. <P>COPYRIGHT: (C)2013,JPO&INPIT |
