| 摘要 |
PURPOSE: A piezo actuator is provided to be surrounded by a magnetic fluid which serves as a damper around a magnet by installing a magnet on the top of a mass which is integrally formed on the vibration plate. CONSTITUTION: A mass(120) is installed on the top of a vibration plate(110) in order to receive vibration. The vibration plate which is integrally formed with the mass is formed on both sides while interposing a supporting part(125). A piezoelectric element(130) is installed on the top of the supporting part. A magnet(140) is installed on the top of the mass which is integrally formed on the vibration plate. A magnetic fluid(150) is coated to surround the magnet. A case is provided to surround the piezoelectric element, the supporting part, and a vibration part. The magnetic fluid prevents contact or abrasion with the case in a driving state. |
