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发明名称
THIN-FILM FORMING DEVICE
摘要
申请公布号
KR20120127407(A)
申请公布日期
2012.11.21
申请号
KR20127016616
申请日期
2011.03.17
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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