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发明名称
Method and device for operating a plasma device
摘要
申请公布号
EP1825493(B1)
申请公布日期
2012.11.21
申请号
EP20050817910
申请日期
2005.12.09
申请人
MAX-PLANCK-GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN E.V.
发明人
MORFILL, GREGOR;THOMAS, HUBERTUS, M.;KONOPKA, UWE;JACOB, WOLFGANG;ANNARATONE, BEATRICE;FINK, MARTIN;SATO, NORIYOSHI;SHIMIZU, TETSUJI;STUFFLER, TIMO
分类号
H01J37/32
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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