| 摘要 |
<p>PURPOSE: A substrate transfer apparatus, a coating and developing apparatus including the same, and a substrate transfer method are provided to easily monitor the transfer of a substrate by detecting the position of a substrate holding unit which supports and transfers the substrate. CONSTITUTION: A transfer apparatus(A3) includes supporting units(13A,13B) which support a substrate. The transfer apparatus includes a base(31) which slantly supports the supporting unit. A position sensor(5) detects a position of forks(3A,3B). The position sensor comprises a light emitting unit(5L) and a light receiving unit(5D) corresponding to the light emitting unit. The light emitting unit includes a light source which generates light and a collimator.</p> |
