| 摘要 |
<p>PURPOSE: A jig pallet is provided to precisely adjust X/Y axes using a cam. CONSTITUTION: A spring(120) is formed between a support plate and a housing(100). An adjusting unit(150) adjusts movement of X/Y axis plates. At least two MNPs(160) are formed on the X axis plate. At least two cams(170) are formed on the X axis plate for micro control before contacting a cell. The height of the support plate is controlled by a rotor(153). [Reference numerals] (AA) MNP vertical movement; (BB) Support unit</p> |
