发明名称 |
FORMATION OF A LITHIUM COMPRISING STRUCTURE ON A SUBSTRATE BY ALD |
摘要 |
A method for the formation of lithium includes a layer on a substrate using an atomic layer deposition method. The method includes the sequential pulsing of a lithium precursor through a reaction chamber for deposition upon a substrate. Using further oxidizing pulses and or other metal containing precursor pulses, an electrolyte suitable for use in thin film batteries may be manufactured. |
申请公布号 |
EP2225407(A4) |
申请公布日期 |
2012.11.21 |
申请号 |
EP20080866667 |
申请日期 |
2008.12.23 |
申请人 |
UNIVERSITETET I OSLO |
发明人 |
NILSEN, OLA;FJELLVAAG, HELMER;ALNES, MARI, ENDRESEN;AALTONEN, TITTA;PUTKONEN ,MALTI |
分类号 |
C23C16/40;C23C16/455;H01M10/04;H01M10/0562;H01M10/36 |
主分类号 |
C23C16/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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