| 摘要 |
A method of forming an array of piezoelectric actuators on a membrane (18), characterised by comprising the steps of:
- preparing a piezoelectric comb-like structure having an array of islands that are integrally connected by a continuous top portion and that are to form piezoelectric layers (36) of the actuators (20), the islands having an electrode (32) at a bottom side,
- attaching the comb-like structure with its bottom electrode to a surface of the membrane (18),
- removing the continuous top portion of the comb-like structure thereby to separate the actuators from one another, and
- forming top electrodes (34) on the top surfaces of the piezoelectric layers (36) of the actuators. |
