| 摘要 |
<p>Provided are a waveguide capable of suppressing strain and defect caused in a semiconductor in an initial stage or during operation due to a manufacturing process or the like to realize improvement and stabilization of characteristics such as oscillation characteristics, and a method of manufacturing the waveguide. A waveguide includes a first conductor layer and a second conductor layer that are composed of a negative dielectric constant medium having a negative real part of dielectric constant with respect to an electromagnetic wave in a waveguide mode, and a core layer that is in contact with and placed between the first conductor layer and the second conductor layer, and includes a semiconductor portion. At least the first conductor layer has a particular depressed and projected structure extending in an in-plane direction.</p> |
