发明名称 |
METHOD OF USING AN ATOMIC FORCE MICROSCOPE AND MICROSCOPE |
摘要 |
The method involves performing a bimodal excitation of the microlever (M) which is attached on the sample and analyzing the variation in the oscillation amplitude of the output signal for obtaining the topographic information in relation to the sample. The variation in the phase of output signal is analyzed for obtaining the compositional information in relation to the sample. |
申请公布号 |
EP1912055(A4) |
申请公布日期 |
2012.11.21 |
申请号 |
EP20060830902 |
申请日期 |
2006.02.21 |
申请人 |
CONSEJO SUPERIOR DE INVESTIGACIONES CIENTIFICAS |
发明人 |
GARCIA GARCIA, RICARDO;RODRIGUEZ FRUTOS, TOMAS, RAUL |
分类号 |
G01Q60/24;G01Q60/34;B82Y35/00;G01Q30/04;G01Q60/32 |
主分类号 |
G01Q60/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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