METHOD AND SYSTEM FOR CENTERING WAFER ON CHUCK,申请号EP20090831551-传众专利搜索

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发明名称	METHOD AND SYSTEM FOR CENTERING WAFER ON CHUCK
摘要
申请公布号	EP2377152(A4)	申请公布日期	2012.11.21
申请号	EP20090831551	申请日期	2009.12.04
申请人	LAM RESEARCH CORPORATION	发明人	O'NEILL, ROBERT GRIFFITH;LUQUE, JORGE;CHOU, SHANG-I;SINGH, HARMEET
分类号	H01L21/68;H01L21/67	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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