Time-of-Flight-Based Mass Microscope System for High-Throughput Multi-Mode Mass Analysis

摘要

PURPOSE: A flight time based mass microscope system is provided to change lens conditions by measuring mass imaging analysis of a sample with a TOF(Time of flight) base microscope mode. CONSTITUTION: A laser input unit(110) radiates laser beam to a sample. An ion gun assembly(120) radiates ion beam to the sample. A sample inlet chamber(130) introduces the sample through a sample inlet unit(131). The sample is arranged on a sample plate(140). A sample plate manipulator(150) controls the location of the sample plate. A CCD(Charge Coupled Device) camera takes a photograph of an image of the sample. A source lens assembly controls focus of the laser beam or the ion beam. A position measuring TOF detector measures the location of secondary ion generated in the sample.