EPITAXIAL DEPOSITION PROCESS AND APPARATUS,申请号KR20117002537-传众专利搜索

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发明名称	EPITAXIAL DEPOSITION PROCESS AND APPARATUS
摘要
申请公布号	KR101201964(B1)	申请公布日期	2012.11.20
申请号	KR20117002537	申请日期	2007.01.16
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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