| 摘要 |
A capacitive acceleration sensor that prevents sticking of a mass body, made of silicon, to a first sealing substrate or a second sealing substrate, made of glass. The capacitive acceleration sensor includes a first sealing substrate and a second sealing substrate each made of glass. The mass body is suspended between the first and second sealing substrates by a beam attached to a substrate, and one or both of the sealing substrates is processed such that the mass body only contacts with a subsection of the substrate surface. |
