发明名称 |
Electrostatic modulation of surface roughness |
摘要 |
A method for modulating roughness of a surface, comprising: providing a first pre-stressed electrically conductive layer (10) coupled to a dielectric elastic foundation (20) provided over a second conductive layer (30); and subjecting the two conductive layers to a voltage difference, thereby modulating the roughness of the first surface. |
申请公布号 |
US8313839(B2) |
申请公布日期 |
2012.11.20 |
申请号 |
US20040086677 |
申请日期 |
2004.09.19 |
申请人 |
ABU-SALIH SAMY;ELATA DAVID;TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LTD. |
发明人 |
ABU-SALIH SAMY;ELATA DAVID |
分类号 |
B32B15/06;B29C59/16;B29D11/00;G02F1/03;H01L;H01L41/08 |
主分类号 |
B32B15/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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