Actuator, liquid droplet ejecting head, and manufacturing method thereof, and liquid droplet ejecting apparatus

摘要

An actuator that includes a substrate; first conductive layers provided so as to extend in a first direction and to be disposed adjacent to each other on the substrate; a piezoelectric body layer having a first portion formed so as to cover the first conductive layers and openings between the first conductive layers, a second portion other than the first portions, and a contact to the first conductive layer; a second conductive layer having a third portion which overlap with the first conductive layers in the second direction, a fourth portion connected to the third portion being formed over the second portion of the piezoelectric body layer, and a fifth portion connected to the first conductive layer in the contact; and a wiring having a sixth portion which is formed over the fourth portion of the second conductive layer and a seventh portion connected to the fifth portion.